Faculty of Natural Sciences,
Šiauliai University, P. Višinskio st. 19,
LT-77156 Šiauliai, Lithuania.
Director Prof. Habil. Dr. Arvydas Juozapas Janavičius
Tel. +370 687 60200
Fax. +370 41 595794,
E-mail: AYanavy@gmail.com
Center acts from 1999 and collaborates with Physics Faculty of Vilnius University. We investigated theoretically and experimentally the diffusion of metastable vacancies generated in silicon by soft X-rays. Obtained important results were applied for investigation of impurities superdiffusion phenomena in silicon, conditions and profiles in the irradiated samples. Proposed new technologies open the possibility to drive-in boron and phosphorus into silicon at room temperature and can be used for production of microelectronics devices and solar cells.
Main results are presented in the paper: A.J. Janavičius, S. Balakauskas, V. Kazlauskienė, A. Mekys, R. Purlys, J. Storasta, Superdiffusion in Si Crystal Lattice Irradiated by Soft X-rays, Acta Physica Polonica, 114, 779 (2008)
